技術摘要(英)
A reaction apparatus is provided. The reaction apparatus includes a first tank, a second tank, a cover, a stirring assembly, a heater, a controller and a gas delivery system. The first tank has an accommodating space. The second tank is in the accommodating space of the first tank and including holes. The cover is disposed at an opening of the first tank. The stirring assembly is on the cover. The stirring assembly includes a drive motor and a stirrer connected to the drive motor. The stirrer is in the accommodating space of the first tank. The heater is in the accommodating space of the first tank. The controller is coupled to the heater to control the heater. The gas delivery system passes through the first tank and communicates with the accommodating space of the first tank.