Update: 2025-11-28  Visitor: 0000776168
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HEAD-Matrix ALD+ System

Organization | ITRI
Awards | 2023 R&D 100 Awards
HEAD-Matrix ALD+ System

The HEAD-Matrix ALD+ System streamlines semiconductor manufacturing by integrating multiple deposition processes into a single chamber, enhancing accuracy, efficiency, and sustainability. It meets the demands of high aspect ratios, multicomponent uniformity, and precise application of thin films. Its versatility extends to OLED components, LED lighting, LCD backlight panels, solar photovoltaics, thin-film solid-state batteries, and 5G wireless communication devices.

Last update: 2025-11-29

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