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Ministry of Economic Affairs,R.O.C.

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2023-12-05 09:30
Department of Industrial Technology

HEAD-Matrix ALD+ System

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The HEAD-Matrix ALD+ System streamlines semiconductor manufacturing
The HEAD-Matrix ALD+ System streamlines semiconductor manufacturing by integrating multiple deposition processes into a single chamber, enhancing accuracy, efficiency, and sustainability. It meets the demands of high aspect ratios, multicomponent uniformity, and precise application of thin films. Its versatility extends to OLED components, LED lighting, LCD backlight panels, solar photovoltaics, thin-film solid-state batteries, and 5G wireless communication devices.